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CMP PAD CONDITIONER DICING BLADES BACK GRINDING WHEELS LED GRINDING WHEELS PCB DRESSER PLATE/ DRILLING & MILLING GRINDING WHEELS DIAMOND WHEELS POLISHING TOOLS DIAMOND DRESSERS DIAMOND FILES / MOUNTED POINTS Pn、P35
CMP Pad Conditioner
  • 化學共價鍵結合,鑽石永不脫落
  • 低溫燒結(750℃),不會破壞鑽石的結晶體,導致鑽石剝落(peeling),造成晶圓刮傷(scratch)
  • 低溫燒結,鑽石結晶強度完整,不用break-in,可增加使用壽命(life time),降低break-in的時間成本
  • 鑽石的高低(大小)誤差值25μm(量測20點的平均值)
  • 生產工業鑽石工具已有30年的經驗,無論在品質產品的穩定上,都有相當的水準
  • 國內自製生產(Maker),價格具競爭力
  • Chemical covalent bond , No diamond loss
  • Low temperature(750℃), the crystal of diamond is flawless , so as to prevent diamond peeling and scratch wafer.
  • Diamond tolerance 25μm ( average height of 20 points )
  • Don’t break-in , increase life time and is a maker so most competitive.
  • 高溫燒結,會破鑽石的結晶體,導致鑽石剝落(peeling)造成晶圓刮(scratch)
  • 高溫燒結,鑽石太圓,不利於pad修整
  • 高溫燒結,鑽石晶體已被破壞,所以一定要break-in.時間愈長,造成晶圓刮傷(scratch)比率愈少.
  • 鑽石的大小落差太大,造成pad修整平質不良,影響晶圓平坦化的品質,乃致於影響IC成品的良率
  • High temperature, diamond peeling and scratch wafer.
  • High temperature, diamond is blocky, so unstable R.R , U% and lifetime.
  • 鑽石與Ni沒有共價鍵結合,鑽石易脫落,會刮傷晶圓
  • 電鑄鑽石容易重疊
  • Electroplated is not chemical covalent bond , diamond loss could scratch wafer.
  • Electroplated , diamond overlap easily.
  • PCD硬度較單晶鑽石差
  • PCD壽命較單晶鑽石差
  • Mono crystal diamond hardness than PCD
  • Mono crystal diamond longer lifetime than PCD
 
民霖科技有限公司 MILLION TECHNOLOGY CO.,LTD TEL:+886-3-526-9899 FAX:+886-3-525-3035